The Kenosistec evaporator system is in operation at DIFILab for all users. The system is made up of a cylindrical process chamber equipped with:

• Two magnetrons with 2” targets for sputter deposition
• An e-beam evaporation (rotating carousel with up to 4 crucibles).
• Ion sputtering gun for etching of the samples.
• Heating stage up to 800 °C.
• Gas inlets for Argon and Nitrogen or Oxygen.

Sample fabrication processes can make use also of:

• a plasma cleaner/etcher Gambetti Falcon, which can provide both oxygen plasma for samples cleaning and argon or SF6 plasma for etching.
• a chemical hood, equipped with a spin-coater, a hot-plate, a microbalance, and an ultrasonic bath.