Ellipsometry at DIFILAB

The "Accurion nanofilm_ep4" ellipsometer is an instrument dedicated to the measurement of optical properties of materials with lateral resolution down to the micrometer scale. Its principle of operation is based on the application of multi-wavelength ellipsometry, allowing to obtain quantitative and high-sensitivity information on the optical response of materials, particularly thin and ultrathin films, and materials with reduced dimensionality, including nanostructured ones. The available types of measurements, coupled with suitable data analysis, allow to extract the dielectric constants of the materials under investigation. The micro-ellipsometer finds natural application in those fields of physics where the characteristic size of samples is spatially limited to a few micrometers.
The radiation sources employed are regularly spaced from near UV to near IR to cover different optical response regimes of solids.